Characterization of coating probe with Ti-DLC for electrical scanning probe microscope

► We investigate the characterization of Ti doped diamond-like-carbon (DLC) as coating material on a silicon cantilever for ESPM. ► We deposited a layer of Ti-DLC thin film on the surface of Si cantilever by magnetron sputtering. ► The electric conductivity and the scanning image quality of the Ti-DLC-coated probes were the same as the commercial conductive probes, while the wear resistance and service life was significantly better.