Angular distribution of species in pulsed energy beam deposition of oxide films

► Thickness profiles of BaxSr1−xTiO3 thin films were measured. ► Comparison between pulsed laser (PLD) and pulsed electron beam deposition (PED). ► The film thicknesses profile of PED has a slightly broader shape than that of PLD. ► The film stoichiometry is preserved at all angles.