Addition of surfactants in ozonated water cleaning for the suppression of functional group formation and particle adhesion on the SiO2 surface

► Effect of surfactant addition in ozonated water on the suppression of organic function group formation and particle adhesion to SiO2 surface. ► Introduction of multi-internal reflection Fourier transform infrared spectroscopy for the analysis. ► Addition of anionic glycolic acid ethoxylate 4-tert-butylphenyl ether in ozonated water prevents particle adhesion and organic group formation on the SiO2 surface.