Synthesis of titanium nitride thin films deposited by a new shielded arc ion plating

► A new shielded arc ion plating method with double layers and vicarious circular holes, were developed, we called DL-SAIP. ► When the distance between the double-layered shield plates is 10 mm, the film surface is smooth and homogeneous, and almost no particles are seen. ► Because of their low droplet particles number and uniform deposition rate, the TiN films prepared by this technique can be expected to perform well in applications.