The Influence of Ta underlayers on the structure of TiO2 thin films deposited on an unheated glass substrate

► Anatase TiO2 films were successfully obtained on unheated glass substrates. ► Crystallization of TiO2 thin films using Ta underlayers. ► Ti seed layer effect on the Ta underlayer crystallization. ► Anatase TiO2 films were also obtained on Ta/Ti underlayers without annealing.