Oxidation effect on the SIMS analysis of samples sputtered and deposited by the Storing Matter technique

► Storing Matter is a novel technique that can improve the sensitivity during SIMS analysis. ► The influence of the oxidation of a Si collector on the secondary ion yields of In and Au deposits is analyzed. ► Surfaces with very different levels of oxidation led to modified secondary ions yields. ► The oxidation generated on a Si0 collector under vacuum is not enough to induce relevant changes.