Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

► We studied the effect of ZnO under layers on crystal structure of TiN thin films. ► Double-layered coatings consisting of ZnO/TiN were deposited by magnetron sputtering. ► The ZnO/TiN coatings exhibited TiN{1 0 0} preferred orientation. ► This TiN crystal growth should be caused by ZnO{0 0 1} crystal lattice planes.