Dielectric properties of continuous composition spreaded MgO-Ta2O5 thin films

► We explored new dielectric compositions and thin films using continuous composition spread. ► MgO and Ta2O5 compound films were deposited on a substrate and high throughput evaluated. ► We found some specific compositions which had high dielectric constant and very low dielectric loss. ► These optimized thin film compositions were processed at low temperature (below 350 °C).