Superhydrophobic hierarchical surfaces fabricated by anodizing of oblique angle deposited Al-Nb alloy columnar films

► The authors developed a combined process of oblique angle magnetron sputtering and anodizing to fabricate submicron-/nano-dual scale porous structures. ► By utilizing such dual scale porous surface structure, superhydrophobic surface has been realized after coating the oxide surface with a fluoroalkyl phosphate layer.