Ellipsometric studies on TiO2 thin films synthesized by spray pyrolysis technique

► While many research articles are available on the optical properties of TiO2 thin films synthesized by rf magnetron sputtering, reactive deposition etc., little information is available on the optical properties of thin films deposited by spray pyrolysis technique which is more versatile and can be applied for large area applications. ► This article explores the effect of substrate temperature and roughness of very thin films (typically ∼20 nm) on the refractive indices. A Bruggemen effective medium approximation was carried out to estimate the void fraction and surface roughness of the thin films. ► A dielectric modeling based on Forouhi Bloomer formulation has been carried out to benchmark spray pyrolysed thin TiO2 films.