Quantification of oxygenated species on a diamond-like carbon (DLC) surface

► The thickness of the oxidized surface layer of diamond-like carbon (DLC) films was estimated to be about 2-3 nm thick. ► The use of chemical derivatization method in conjunction with XPS was demonstrated to determine the relative composition of hydroxyl, ether, carbonyl, and carboxyl groups in the oxidized surface region of the DLC film. ► In the oxidized surface region, the hydroxyl group content seems to be lower than other oxygenated groups.