Direct current magnetron sputter-deposited ZnO thin films

▶ The effects of deposition parameters on the properties of ZnO films deposited on glass substrates are revealed in this paper. ▶ The granular structures of the ZnO films are enhanced with the increasing film thickness, deposition pressure and substrate temperature. ▶ Thinner film, higher deposition pressure and higher substrate temperature enhance the optical transmittance of the ZnO.