Epitaxial growth of titanium oxycarbide on MgO (0Â 0Â 1) substrates by pulsed laser deposition

▶ High-quality epitaxial TiCxOy films are successfully grown on MgO (0 0 1) substrates. ▶ The stoichiometry of TiCxOy is about x ∼ 0.47 and y ∼ 0.69. ▶ The TiCxOy film is electrically conducting with resistivity of 137 μ Ω cm.