Influence of processing parameters on the growth characteristics and ferroelectric properties of sputtered PZT thin films on stainless steel substrates

- Phase pure perovskite can be grown in PZT/Pt/SS by controlling processing conditions.
- A fast and short duration post-annealing facilitates high perovskite nucleation rate.
- Post-annealing heating rate affects the texture selection of PZT films on Pt/SS304.
- Pt film in between PZT and SS304 does not act as an effective diffusion barrier.
- A Fe-rich and Pb- and O-lean phase develops at PZT/Pt interface upon crystallization.