کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5360232 1388258 2010 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness
چکیده انگلیسی
We report results obtained from optical absorption studies carried out on amorphous silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane plasma. The influence of the film thickness was studied on the two series of samples deposited from undiluted silane and under moderate hydrogen dilution of silane. Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band-gap energies Eg, the B factors of the Tauc plots, the iso-energy values E04 (energy at which the absorption coefficient is equal to 104 cm−1). The results were correlated with volume fractions of the amorphous phase and voids and with the film thickness.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 18, 1 July 2010, Pages 5667-5671
نویسندگان
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