Self-assembled monolayers assisted thin film growth of aluminum doped zinc oxide by spray pyrolysis method

► Highly c-axis oriented AZO films have been prepared by spray pyrolysis technique on SAM modified substrates. ► With SAM modified substrates the crystal structure of the films is significantly improved and the grain size is increased. ► The average transmittance in the visible region varies from 85% to more than 95% for films deposited on SAM modified substrate. ► Concentration of structural defects and resistivity decreases for films deposited on SAM modified substrates.