Temperature and size effects on electrical properties and thermoelectric power of Bismuth Telluride thin films deposited by co-sputtering

► Grain size of annealed Bi2Te3 film increases with increasing of thickness. ► Electrical conductivity of annealed films increases with increasing of grain size. ► Seebeck coefficient of films increases with increasing of thickness. ► Various physical parameters have been calculated by classical size effect theory. ► The electron-phonon interaction is the main scattering mechanism in Bi2Te3 films.