Sputter deposition of indium tin oxide onto zinc pthalocyanine: Chemical and electronic properties of the interface studied by photoelectron spectroscopy

► Sputter deposition of ITO has been performed on top of the organic semiconductor (ZnPc). ► Interface formation was investigated by in situ XPS. ► No chemical reaction at the interface, i.e. no sputter damage, is observed. ► The barrier height for hole injection (0.9 eV) does not depend on the deposition sequence of the layers. ► Sputtered ITO layers should be feasible as top electrodes for inverted, stacked and fully transparent OLEDs.