Research on the effects of machining-induced subsurface damages on mono-crystalline silicon via molecular dynamics simulation

► MD simulations of nano-cutting process are carried out to obtain machining-induced subsurface with diamond cutting tools. ► After cutting, the crystal lattice reconstructed and led to the formation of the machined surface. ► The mechanical properties of the pristine and machining-induced subsurface Si are studied by means of nanoindentation. ► Nanoindentation results show that the hardness of the machined surface was smaller than mono-crystalline Si.