Physical properties and surface/interface analysis of nanocrystalline WO3 films grown under variable oxygen gas flow rates

► Nanocrystalline WO3 films were grown under variable oxygen gas flow rates. ► Surface/interface structure of WO3 films is evaluated. ► Density variation in WO3 films as function of oxygen reactive pressure is established. ► A correlation between TEM and XRR data is established.