Laser induced activation of circuit lines and via-holes on AlN for electroless metal plating

► The research results on fine lines show the relations between the quality of copper metallization and laser wavelengths, energy density, repetition rate and repetition. ► Metallic aluminium produced by decomposition of AlN on local laser irradiated surfaces is proven with the XPS data and is seen to be the electron supplier and catalyzing center for electrochemical reactions in electroless copper bath. ► Blind, through-hole and V-shaped micro via-holes show depth-dependent activation and metallization.