Photosensitive sol-gel preparation and direct micro-patterning of c-oriented ZnO film

► A photosensitive sol-gel method is employed to prepare ZnO film. The unique of this method lies in the fact that the obtained sol and gel is sensitive to the UV light. ► Transparent and c-oriented ZnO film can be obtained on glass through an optimal heat treatment process. ► Using the photosensitive sol-gel method combined with UV-exposure and leaching, patterned ZnO film can be obtained. ► This kind of patterning method is simple and low-cost, without degrading the film properties.