کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5362041 | 1388280 | 2009 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
The influence of processing gas on the mechanical properties of sputtered B-C-N-H films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: The influence of processing gas on the mechanical properties of sputtered B-C-N-H films The influence of processing gas on the mechanical properties of sputtered B-C-N-H films](/preview/png/5362041.png)
چکیده انگلیسی
This work describes the microstructure and mechanical properties of B-C-N-H films synthesized by medium frequency magnetron sputtering from a boron target in a N2Â +Â CH4Â +Â Ar gas mixture. The increase in the CH4 flow rate increases the carbonaceous compound species, causes the increase of the C atomic concentration and promotes the formation of sp3-hybridized carbon. The change of hardness with the CH4 flow rate had a relationship with the residual stress. The coefficient of friction was reduced approximately from 0.8 to 0.18, and wear resistance was considerably improved by increasing the flow of CH4 gas component from 0 to 40Â sccm. The change of films' hardness was discussed and attributed primarily to the internal defects and bonding characteristics, while the superior tribological properties of the films could be assigned to the formation of sp3-hybridized carbon and the C-H bonding.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 255, Issue 20, 30 July 2009, Pages 8575-8581
Journal: Applied Surface Science - Volume 255, Issue 20, 30 July 2009, Pages 8575-8581
نویسندگان
Youming Chen, Shengrong Yang, Junyan Zhang,