کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5362054 1388280 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhanced optical properties of Al-doped TiO2 thin films in oxygen or nitrogen atmosphere
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Enhanced optical properties of Al-doped TiO2 thin films in oxygen or nitrogen atmosphere
چکیده انگلیسی
Al-doped TiO2 (TiO2:Al) films were deposited by simultaneous RF magnetron sputtering of TiO2 and DC magnetron sputtering of Al. The advantage of this method is that the Al content could be independently controlled. By depositing in a mixed Ar-O2 or a mixed Ar-N2 atmosphere, the TiO2:Al film became more stoichiometric and the nanocrystallinity was enhanced. The nonlinear refractive index of TiO2:Al film deposited in a pure Ar, a mixed Ar-O2 or a mixed Ar-N2 atmosphere was measured by Moiré deflectometry, and was of the order of 10−8 cm2 W−1. For the TiO2:Al film deposited in a pure Ar atmosphere, the porosity was higher corresponding to the lower transmission. However, the porosity of TiO2:Al film decreased as the oxygen or nitrogen pressure increased. Especially, as the ratio of O2 to Ar pressure increased to 0.22, TiO2:Al film exhibited lower porosity, higher visible transmission, higher linear refractive index, lower stress and lower stress-optical coefficient.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 255, Issue 20, 30 July 2009, Pages 8654-8659
نویسندگان
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