Surface morphology, structure, magnetic and electrical transport properties of reactive sputtered polycrystalline Ti1−xFexN films

► The lattice orientation changes from (2 0 0) to (1 1 1) with the increasing x. ► All of the films are ferromagnetic with a Curie temperature of higher than 305 K. ► Asymmetric M-H curves have been observed at low temperatures, and the shift of the M-H curves decreases with the increase of temperature. ► All of the samples show semiconducting-like behavior with a mechanism of variable-range hopping at low-temperature range.