Formation of nanodots on GaAs by 50Â keV Ar+ ion irradiation

► Creation of nanodots by energetic ion. ► Nanodots are formed on GaAs surface by 50 keV Ar+ ion irradiation. ► Characterization using atomic force microscopy and micro-Raman spectroscopy is reported. ► Average dot size, density of dots and rms roughness varied are analyzed with fluence. ► Strain production and relaxation occurred with irradiation.