Modulation of residual stress in diamond like carbon films with incorporation of nanocrystalline gold

► Nanocrystalline gold doped diamond like carbon films were synthesized. ► Residual stress in the films was estimated through a nondestructive way using optical absorption band tail broadening. ► Stress was found to dependent on relative amount of sp2/sp3 hybridized carbon atoms in the films. ► Films became stress relieved upon gold incorporation.