Effect of RF power and sputtering pressure on the structural and optical properties of TiO2 thin films prepared by RF magnetron sputtering

► Preparation of nanocrystalline TiO2 thin films from a ceramic target by RF magnetron sputtering. ► The use of micro Raman spectroscopic analysis for the unambiguous presence of anatase and rutile phases in amorphous-like TiO2 films. ► Analysis of optical parameters of nanocrystalline films using the concept of quantum confinement effect. ► Study of PL spectra of pure TiO2 thin films and the effect of sputtering parameters on the PL spectra.