Thermodynamic parameters of Bi2Sr2CaCu2O8+δ thin film prepared by molecular beam epitaxy

► Bi-based oxide thin films have been successfully fabricated by molecular beam epitaxy. ► The phase formation in Bi2Sr2CaCu2O8+δ films was investigated as a function of oxidizing gas pressure and substrate temperature. ► The ozone partial pressure-substrate temperature phase diagram has been established in the Bi2Sr2CanCun+1Om (n = 1, 2, 3) thin films. ► The thermodynamic parameters have been investigated through enthalpy change in the growth process of Bi-based thin films.