کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5364109 1388311 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Biaxial stresses, surface roughness and microstructure in evaporated TiO2 films with different deposition geometries
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Biaxial stresses, surface roughness and microstructure in evaporated TiO2 films with different deposition geometries
چکیده انگلیسی

The residual stresses, surface roughness and microstructure in titanium oxide films prepared by electron-beam evaporation and deposited with different geometries were investigated, with particular focus on the in-plane anisotropy of the biaxial stresses and microstructures. Thin films were deposited with various deposition angles on B270 glass substrates and silicon wafers. Two different types of deposition geometries were studied. The residual stress in the thin films was examined by a phase-shifting Twyman-Green interferometer. The optical constants, biaxial stress and surface roughness were found to be related to the evolution of the anisotropic microstructures in the films. The results revealed that the anisotropic stresses that developed in the evaporated titanium oxide films were dependent upon the deposition geometry and microstructure of the films.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 3, 15 November 2009, Pages 870-875
نویسندگان
,