کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5364474 | 1388316 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Antireflective structure imprinted on the surface of optical glass by SiC mold
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
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چکیده انگلیسی
An antireflective structure with two-dimensional 300-nm periodicity was fabricated on a phosphate glass surface using an imprinting process with a SiC mold. The optimized structure designed using RCWA calculation was a convex circular cone sharing the ridge line of adjacent cones. The SiC mold was fabricated using electron beam drawing and subsequent reactive ion etching with CHF3 and O2 gases. The glass' surface reflectance was estimated as 0.2% at 530Â nm wavelength, which was approximately 1/20 that of the optically polished surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 255, Issue 7, 15 January 2009, Pages 4267-4270
Journal: Applied Surface Science - Volume 255, Issue 7, 15 January 2009, Pages 4267-4270
نویسندگان
Kazuhiro Yamada, Makoto Umetani, Takamasa Tamura, Yasuhiro Tanaka, Haruya Kasa, Junji Nishii,