کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5365339 1388329 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Al2O3/SiO2 films prepared by electron-beam evaporation as UV antireflection coatings on 4H-SiC
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Al2O3/SiO2 films prepared by electron-beam evaporation as UV antireflection coatings on 4H-SiC
چکیده انگلیسی
Al2O3/SiO2 films have been deposited as UV antireflection coatings on 4H-SiC by electron-beam evaporation and characterized by reflection spectrum, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The reflectance of the Al2O3/SiO2 films is 0.33% and 10 times lower than that of a thermally grown SiO2 single layer at 276 nm. The films are amorphous in microstructure and characterize good adhesion to 4H-SiC substrate. XPS results indicate an abrupt interface between evaporated SiO2 and 4H-SiC substrate free of Si-suboxides. These results make the possibility for 4H-SiC based high performance UV optoelectronic devices with Al2O3/SiO2 films as antireflection coatings.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 254, Issue 10, 15 March 2008, Pages 3045-3048
نویسندگان
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