کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5366782 1388355 2011 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of machining characteristics in electrochemical etching using laser masking
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Analysis of machining characteristics in electrochemical etching using laser masking
چکیده انگلیسی

Electrochemical etching using laser masking (EELM), which is a combination of laser beam irradiation for masking and electrochemical etching, allows the micro fabrication of stainless steel without photolithography technology. The EELM process can produce various micro patterns and multilayered structures. In this study, the machining characteristics of EELM were investigated. Changes in characteristics of recast layer formation and the protective effect of the recast layer according to the laser masking conditions and electrochemical etching conditions were investigated by field emission scanning electron microscopy (FE-SEM), focused ion beam (FIB) and X-ray photoelectron spectroscopy (XPS). The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect during electrochemical etching and good form accuracy. Finally, micro patterns and structures were fabricated by EELM.

► Changes in characteristics of recast layer formation were investigated according to the laser masking conditions. ► The protective effects of the recast layer were investigated according to the electrochemical etching conditions. ► The oxidized recast layer with a thickness of 500 nm was verified to yield a superior protective effect.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 258, Issue 5, 15 December 2011, Pages 1689-1698
نویسندگان
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