کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367096 1388361 2007 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique
چکیده انگلیسی

Tantalum nitride films were deposited on silicon wafer and steel substrates by cathodic vacuum arc in N2/Ar gas mixtures. The chemical composition, crystalline microstructure and morphology of the films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM), respectively. According to the results, film composition and microstructure depends strongly on the N2 partial pressure and the applied negative bias (Vs).

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 12, 15 April 2007, Pages 5223-5227
نویسندگان
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