Keywords: نیترید تانتالیم; Direct current magnetron sputter; Tantalum nitride; Thin film resistor; Nitrogen partial pressure; Reliability; Accelerated degradation test;
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Keywords: نیترید تانتالیم; Nano-mechanical properties; Roughness; Tantalum nitride; Target poisoning; Sputtering; Thin film;
Keywords: نیترید تانتالیم; Lattice nitrogen; Tantalum nitride; Nitrogen transfer reaction;
Keywords: نیترید تانتالیم; Tantalum nitride; Roughness; Molecular dynamics simulation; Sputtering power;
Keywords: نیترید تانتالیم; Wide band gap application; Copper metallization; High-temperature; Tantalum; Tantalum nitride;
Keywords: نیترید تانتالیم; Tantalum nitride; Forming-free switching; Cerium oxide; Sputtering; Resistive random access memory;
Keywords: نیترید تانتالیم; Carbon nanotube growth; Tantalum nitride; Magnetron sputtering; HIPPIMS; CVD;
Keywords: نیترید تانتالیم; Tantalum nitride; Nanotubular membranes; Titanium nitride; Water splitting;
Polylaminate TaN/Ta coating modified ferritic stainless steel bipolar plate for high temperature proton exchange membrane fuel cell
Keywords: نیترید تانتالیم; High temperature proton exchange membrane fuel cell; Bipolar plates; Tantalum; Tantalum nitride; Corrosion resistance;
Characterization of the structure and electrochemical behavior of Ag-TaN nanostructured composite coating for biomedical applications
Keywords: نیترید تانتالیم; Tantalum nitride; Silver nanoparticles; Corrosion; Silver release; Magnetron sputtering;
Influence of backscattered neutrals on the grain size of magnetron-sputtered TaN thin films
Keywords: نیترید تانتالیم; Magnetron sputtering; Backscattered neutrals; Thin film morphology; Grain size; High power impulse magnetron sputtering; Tantalum nitride; Ta3N5;
TaNX coatings deposited by HPPMS on SS316L bipolar plates for polymer electrolyte membrane fuel cells: Correlation between corrosion current, contact resistance and barrier oxide film formation
Keywords: نیترید تانتالیم; Tantalum nitride; HPPMS; Fuel cells; Corrosion; ICR; AES;
Thermally-induced phase transformation sequence of arc evaporated Ta-Al-N coatings
Keywords: نیترید تانتالیم; Cathodic arc evaporation; Tantalum nitride; Thermal stability;
Growth of tantalum nitride film as a Cu diffusion barrier by plasma-enhanced atomic layer deposition from bis((2-(dimethylamino)ethyl)(methyl)amido)methyl(tert-butylimido)tantalum complex
Keywords: نیترید تانتالیم; Tantalum nitride; Plasma-enhanced atomic layer deposition; Metal-organic precursor; Copper diffusion barrier;
Enhanced organic dye removal of porous BN fibers supported Ta3N5 nanoparticles under visible light irradiation
Keywords: نیترید تانتالیم; Photocatalysis; Tantalum nitride; Porous boron nitride fibers; Dye removal;
Effect of N2 flow rate on the microstructure and electrochemical behavior of TaNx films deposited by modulated pulsed power magnetron sputtering
Keywords: نیترید تانتالیم; Tantalum nitride; Modulated pulsed power magnetron sputtering; Microstructure; Surface topography; Crystal structure; Corrosion resistance; Pitting potential
Tribocorrosion response in biological environments of multilayer TaN films deposited by HPPMS
Keywords: نیترید تانتالیم; Tantalum nitride; HPPMS; Multilayer films; Wear; Corrosion; Biomedical implants;
Monitoring tantalum nitride thin film structure by reactive RF magnetron sputtering: Influence of processing parameters
Keywords: نیترید تانتالیم; Tantalum nitride; Thin film; Reactive sputtering; Structure control; Quenching
Galvanic corrosion characteristics of poly silicon–tantalum nitride couple immersed in dilute HF solutions
Keywords: نیترید تانتالیم; Galvanic corrosion; Poly-Si; Tantalum nitride; dissolved O2; Dopant concentration; HF solution
TaSiN nanocomposite thin films: Correlation between structure, chemical composition, and physical properties
Keywords: نیترید تانتالیم; Tantalum nitride; Silicon nitride; Thin films; Optical properties; Electrical properties; Nanocomposites
Secondary hardness enhancement in large period TiN/TaN superlattices
Keywords: نیترید تانتالیم; Titanium nitride; Tantalum nitride; Superlattices; Hard coatings; Non-isostructural; Epitaxy;
Thermal stability and oxidation resistance of arc evaporated TiAlN, TaAlN, TiAlTaN, and TiAlN/TaAlN coatings
Keywords: نیترید تانتالیم; Titanium nitride; Tantalum nitride; Arc evaporation; Multilayer; Thermal stability;
Lubricious silver tantalate films for extreme temperature applications
Keywords: نیترید تانتالیم; Tribology; Friction; Chameleon coating; Tantalum nitride; Silver tantalate;
Atomic layer deposition for high aspect ratio through silicon vias
Keywords: نیترید تانتالیم; TSV; ALD; Aluminum oxide; Tantalum nitride; Ruthenium; High aspect ratio
Magnetron sputter deposited tantalum and tantalum nitride thin films: An analysis of phase, hardness and composition
Keywords: نیترید تانتالیم; Sputter deposition; Tantalum; Tantalum nitride; Hardness; Nitrogen concentration; X-ray diffraction
Ab initio study of the stable phases of 1:1 tantalum nitride
Keywords: نیترید تانتالیم; Tantalum nitride; Barrier layer; Density functional theory;
Combined TiN- and TaN temperature compensated thin film resistors
Keywords: نیترید تانتالیم; Thin Film Resistor; Titanium Nitride; Tantalum nitride; Temperature Coefficient of Resistance; Wheatstone bridge
Structural and mechanical properties of TaN/a-CNx multilayer films
Keywords: نیترید تانتالیم; Tantalum nitride; Carbon nitride; Multilayer; Columnar structure; Tribological property;
Surface-complex films of guanidine on tantalum nitride electrochemically characterized for applications in chemical mechanical planarization
Keywords: نیترید تانتالیم; Chemical mechanical polishing; Impedance spectroscopy; Oxide layer; Surface film; Tantalum nitride;
Nanostructured tantalum nitride films as buffer-layer for carbon nanotube growth
Keywords: نیترید تانتالیم; Material science; Tantalum nitride; Thin films; Chemical vapor deposition; Carbon nanotube; Diffusion barrier
Effect of tantalum nitride supporting layer on growth and morphology of carbon nanotubes by thermal chemical vapor deposition
Keywords: نیترید تانتالیم; Carbon nanotubes; Chemical vapour deposition; Tantalum nitride; Raman; High resolution transmission electron microscopy; Barrier layer
Atomic layer deposition of tantalum nitride based thin films from cyclopentadienyl type precursor
Keywords: نیترید تانتالیم; Tantalum nitride; Tantalum carbide; Atomic layer deposition; ALD; TBTDET; Cyclopentadienyl; Tantalum precursor
Simulation of TaNx deposition by Reactive PVD
Keywords: نیترید تانتالیم; Reactive sputtering; Tantalum nitride; Simulation
Electrochemical investigation of surface reactions for chemically promoted chemical mechanical polishing of TaN in tartaric acid solutions
Keywords: نیترید تانتالیم; Barrier film; Impedance spectroscopy; Metal CMP; Tantalum nitride; Tartaric acid
Nitridation of organo-silicate glass: A self-limiting process for PVD Ta1+xN/Ta barrier formation
Keywords: نیترید تانتالیم; Diffusion barrier; Dielectrics; Physical vapor deposition (PVD); Tantalum; Tantalum nitride; Transmission electron microscopy; X-ray photoelectron spectroscopy (XPS);
Electronic properties of cubic TaCxN1 − x: A comparative study using self-consistent cluster and ab initio band-structure calculations and X-ray spectroscopy
Keywords: نیترید تانتالیم; Tantalum carbide; Tantalum nitride; Electronic structure; Cluster calculation; Band-structure calculation; X-ray photoelectron spectroscopy; X-ray emission spectroscopy; X-ray absorption spectroscopy
Control of electrical resistivity of TaN thin films by reactive sputtering for embedded passive resistors
Keywords: نیترید تانتالیم; Tantalum nitride; Resistivity; Thin film resistors; Reactive sputtering;
Copper diffusion in TaN-based thin layers
Keywords: نیترید تانتالیم; 85.40.Ls; 66.30.Ny; 66.30.Xj; Tantalum nitride; Reactive sputtering; Microstructure; Diffusion; In situ glancing analysis;
Top injection reactor tool with in situ spectroscopic ellipsometry for growth and characterization of ALD thin films
Keywords: نیترید تانتالیم; Atomic layer deposition; ALD; TBTDET; Tantalum nitride; Ellipsometry
MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications
Keywords: نیترید تانتالیم; Resistivity; Photoelectron spectroscopy; Organometallic CVD; Tantalum Nitride; MOS capacitor
Synthesis and characterization of tantalum nitride films prepared by cathodic vacuum arc technique
Keywords: نیترید تانتالیم; Cathodic vacuum arc; Tantalum nitride;
Synthesis and electrochemical characteristics of Ta-N thin films fabricated by cathodic arc deposition
Keywords: نیترید تانتالیم; 52.75.âd; 68.55.âa; 81.65.Kn; Tantalum nitride; Cathodic arc deposition; Microstructure; Corrosion;
FTIR and ellipsometry characterization of ultra-thin ALD TaN films
Keywords: نیترید تانتالیم; Atomic layer deposition; Tantalum nitride; FTIR; Ellipsometry
Fe3+/Fe2+ cycling promoted by Ta3N5 under visible irradiation in Fenton degradation of organic pollutants
Keywords: نیترید تانتالیم; Tantalum nitride; Iron cycling; Photocatalyst; Degradation; Photo-Fenton reaction
Interfacial reactions during sputter deposition of Ta and TaN films on organosilicate glass: XPS and TEM results
Keywords: نیترید تانتالیم; Diffusion barrier; Dielectrics; Physical vapor deposition (PVD); Tantalum; Tantalum nitride; Transmission electron microscopy; X-ray photoelectron spectroscopy (XPS);
Structural and electrical characterization of tantalum nitride thin film resistors deposited on AlN substrates for π-type attenuator applications
Keywords: نیترید تانتالیم; Tantalum nitride; Sputtering; Surface diffusion; Structural properties; TCR; Attenuator
Effect of crystallinity and preferred orientation of Ta2N films on diffusion barrier properties for copper metallization
Keywords: نیترید تانتالیم; Tantalum nitride; Preferred orientation; Diffusion barrier; Annealing
Growth of conformal copper films on TaN by electrochemical deposition for ULSI interconnects
Keywords: نیترید تانتالیم; Surface morphology; Seedless electrodeposition; Thin film growth; Copper; Tantalum nitride; Tantalum pentoxide;
The effects of nitrogen partial pressure on the properties of the TaNx films deposited by reactive magnetron sputtering
Keywords: نیترید تانتالیم; Reactive magnetron sputtering; Tantalum nitride; Acoustic property; Picosecond ultrasonics;
Structural and compositional variations in Ta3N5 produced by high-temperature ammonolysis of tantalum oxide
Keywords: نیترید تانتالیم; Tantalum nitride; Non-stoichiometry; Oxide; Powder neutron diffraction; Band gap