کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367217 1388363 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition
چکیده انگلیسی

We have designed a compact combinatorial pulsed laser deposition (PLD) chamber as a building block of a desktop laboratory for advanced materials research. Development of small-size systems for the growth and characterization of films would greatly help in interconnecting a variety of analytical tools for rapid screening of advanced materials. This PLD chamber has four special features: (1) a drum-shaped growth chamber, (2) a waterwheel-like combinatorial masking system, (3) a multi-target system having one feedthrough, and (4) a small reflection high-energy electron diffraction (RHEED) system. The performance of this system is demonstrated by the RHEED intensity oscillation during homoepitaxial growth of SrTiO3 as well as by simultaneous fabrication of a ternary phase diagram of rare earth-doped Y2O3 phosphors.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 7, 31 January 2006, Pages 2461-2465
نویسندگان
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