کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5367235 1388363 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of combinatorial nm-planar electrode array for high throughput evaluation of organic semiconductors
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Fabrication of combinatorial nm-planar electrode array for high throughput evaluation of organic semiconductors
چکیده انگلیسی

We have fabricated a combinatorial nm-planar electrode array by using photolithography and chemical mechanical polishing processes for high throughput electrical evaluation of organic devices. Sub-nm precision was achieved with respect to the average level difference between each pair of electrodes and a dielectric layer. The insulating property between the electrodes is high enough to measure I-V characteristics of organic semiconductors. Bottom-contact field-effect-transistors (FETs) of pentacene were fabricated on this electrode array by use of molecular beam epitaxy. It was demonstrated that the array could be used as a pre-patterned device substrate for high throughput screening of the electrical properties of organic semiconductors.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 252, Issue 7, 31 January 2006, Pages 2568-2572
نویسندگان
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