Structural optimization of HfTiSiO high-k gate dielectrics by utilizing in-situ PVD-based fabrication method

We investigated the optimum structure for Ti-containing Hf-based high-k gate dielectrics to achieve EOT scaling below 1 nm. TiO2/HfSiO/SiO2 trilayer and HfTiSiO/SiO2 bilayer structures were fabricated by a newly developed in-situ PVD-based method. We found that thermal diffusion of Ti atoms to SiO2 underlayers degrades the EOT-Jg characteristics. Our results clearly demonstrated the impact of the trilayered structure with TiO2 capping for improving EOT-Jg characteristics of the gate stack. We achieved an EOT scaling of 0.78 nm as well as reduced gate leakage of 7.2 × 10−2 A/cm2 for a TiO2/HfSiO/SiO2 trilayered high-k dielectric while maintaining the electrical properties at the bottom interface.