کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5368912 | 1388414 | 2009 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Luminescence properties of Ge implanted SiO2:Ge and GeO2:Ge films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We have investigated cathodeluminescence (CL) of Ge implanted SiO2:Ge and GeO2:Ge films. The GeO2 films were grown by oxidation of Ge substrate at 550 °C for 3 h in O2 gas flow. The GeO2 films on Ge substrate and SiO2 films on Si substrate were implanted with Ge-negative ions. The implanted Ge atom concentrations in the films were ranging from 0.1 to 6.0 at%. To produce Ge nanoparticles the SiO2:Ge films were thermally annealed at various temperatures of 600-900 °C for 1 h in N2 gas flow. An XPS analysis has shown that the implanted Ge atoms were partly oxidized. CL was observed at wavelengths around 400 nm from the GeO2 films before and after Geâ-implantation as well as from SiO2:Ge films. After Geâ-implantation of about 0.5 at% the CL intensity has increased by about four times. However, the CL intensity from the GeO2:Ge films was several orders of magnitude smaller than the intensity from the 800 °C-annealed SiO2:Ge films with 0.5 at% of Ge atomic concentration. These results suggested that the luminescence was generated due to oxidation of Ge nanoparticles in the SiO2:Ge films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 256, Issue 4, 30 November 2009, Pages 954-957
Journal: Applied Surface Science - Volume 256, Issue 4, 30 November 2009, Pages 954-957
نویسندگان
Nobutoshi Arai, Hiroshi Tsuji, Masashi Hattori, Masayuki Ohsaki, Hiroshi Kotaki, Toyotsugu Ishibashi, Yasuhito Gotoh, Junzo Ishikawa,