کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5369485 | 1388438 | 2008 | 4 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Study on the orientation of silver films by ion-beam assisted deposition Study on the orientation of silver films by ion-beam assisted deposition](/preview/png/5369485.png)
Low energy ion beam assisted deposition (IBAD) was employed to prepare Ag films on Mo/Si (100) substrate. It was found that Ag films deposited by sputtering method without ion beam bombardment were preferred (111) orientation. When the depositing film was simultaneously bombardment by Ar+ beam perpendicular to the film surface at ion/atom arrival ratio of 0.18, the prepared films exhibited weak (111) and (200) mixed orientations. When the direction of Ar+ beam was off-normal direction of the film surface, Ag films showed highly preferred (111) orientation. Monte Carlo method was used to calculate the sputtering yields of Ar+ ions at various incident and azimuth angles. The effects of channeling and surface free energy on the crystallographic orientation of Ag films were discussed.
Journal: Applied Surface Science - Volume 254, Issue 6, 15 January 2008, Pages 1565-1568