کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5369990 1388465 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures
چکیده انگلیسی

The surface acoustic waves (SAWs) technique is becoming an attractive tool for accurately and nondestructively characterizing the mechanical property of the brittle low dielectric constant (low-k) thin film. The theoretical equations for describing SAWs propagating on the multi-layered structure are derived in this study. The dispersion features of SAWs propagating on different structures of low-k/SiO2/Si substrate, SiO2/low-k/Si substrate, low-k/Si substrate, and low-k/Cu/Si substrate are investigated to instruct an accurate and facile fitting process for determining Young's modulus of low-k films. The dependence of dispersion relation on the film thickness, elastic modulus of low-k materials as well as frequency are provided and discussed in detail. The study shows an obvious influence of layered structure on the dispersion relation of SAWs. For a fixed structure, the dispersion curvature increases with the decrease of Young's modulus of low-k films.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Applied Surface Science - Volume 253, Issue 5, 30 December 2006, Pages 2958-2963
نویسندگان
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