Structural investigation of ZnO O-polar (0001¯) surfaces and Schottky interfaces

► Schottky contacts of four different metals were grown under typical device fabrication conditions. ► The surface atomic structures were determined by genetic-algorithm model fitting of surface x-ray diffraction. ► The uncoated surfaces and Schottky interfaces exhibit roughness profile with a width of about 1.5 unit cells. ► All samples show a decreased layer distance between the topmost oxygen and zinc layers. ► First study of buried interface of technologically important metal-contacted surface of ZnO O-polar face.