Dependence of the AES backscattering correction factor on the experimental configuration

We present an analysis of the dependence of the backscattering correction factor (BCF) in Auger-electron spectroscopy (AES) on the analyzer acceptance angle. Illustrative BCF calculations are presented for Pd M5N45N45 Auger electrons as a function of primary-electron energy for primary-electron angles of incidence, θ0, of 0° and 80° and for various values of the analyzer acceptance angle. It was necessary to generalize the BCF definition for the case of an analyzer with an arbitrarily large acceptance angle; this was done with a new function, the integral emission depth distribution function. BCFs calculated from an advanced model of electron transport in the surface region of the Pd sample varied weakly with analyzer half-cone angle for θ0 = 0° but more strongly for θ0 = 80° where there were BCF differences varying between 19% at a primary energy of 1 keV and 6% at a primary energy of 5 keV. These BCF differences are due in part to variations of the BCF with emission angle and in part to variations of the density of inner-shell ionizations within the information depth for the detected Auger electrons. The latter variations are responsible for differences larger than 10% between BCFs from the widely used simplified BCF model and those from the more accurate advanced model for primary energies less than about 5 keV for θ0 = 80°. For normal incidence of the primary beam, differences greater than 10% between BCFs from the simplified and advanced models were found for primary energies between 1 keV and 4 keV. These BCF differences indicate that the simplified model can provide only approximate BCF values. In addition, the simplified model does not provide any BCF dependence on Auger-electron emission angle or analyzer acceptance angle.