H content determination at the (1Â 0Â 0) surface of homoepitaxial diamond by Elastic Peak Electron Spectroscopy

Elastic Peak Electron Spectroscopy (EPES) is used to characterize the H termination of the (1 0 0) diamond surface. Two specific features of the technique make this possible, namely surface sensitivity and the ability to directly detect H. An approach to quantify the H content for the particular spatial distribution involved here is discussed and a measure of H surface coverage is given.