Field emission characteristics of an oxidized porous polysilicon field emitter using the electrochemical oxidation process

The field emission characteristics of an oxidized porous polysilicon (OPPS) were investigated with Pt/Ti multilayer electrode using the electrochemical oxidation (ECO) process. A Pt/Ti multilayer electrode, using ECO, showed highly efficient and stable electron emission characteristics; moreover, it can be applied to large area of a glass substrate with a low temperature process. Electron emission characteristics were improved with O2 annealing at 600 °C after the ECO process. It was found that forming a high quality oxide layer from the ECO-formed SiO2 was crucial in improving electron emission characteristics. The Pt/Ti OPPS field emitter, which was annealed at 600 °C for 5 h, showed an efficiency of 3.81% at Vps=14V.