A simple prediction method for composite rectangular microcantilevers with equal width and the dimensional optimization

Resonant frequency is a key parameter in designing a resonant transducer with high sensitivity. Eigen-frequency calculation of a composite-layer microcantilever is quite useful for the design of a microcantilever resonant sensor. However, simple methods for predicting the resonant frequency of composite rectangular microcantilevers are poorly developed and invite further research. This paper presents a simple and accurate analytical method called “equivalent model method” to predict the fundamental resonant frequency of composite rectangular microcantilevers with equal width (CRMEW). This novel method, which is much more convenient for practical applications, is then confirmed by both experimental results and simulation results, and presents a strong potential to be used in the design and optimization of micromachined transducers.