Nanoporous alumina membrane prepared by nanoindentation and anodic oxidation

The fabrication of nanopatterned surfaces at large scale attracts the interest of research groups from a wide range of areas as biotechnology, nanoelectronics and nanomagnetism. An extended method to pattern the surface in the nanoscale is the fabrication of ordered arrays of nanoelements based on porous templates as Nanoporous Anodic Aluminium Oxide (NAAO). One of the challenges of the NAAO fabrication, based on self-organized methods, is the control of the symmetry and lattice parameter of the ordered nanoporous films. In this work, we present a combined method based on Atomic Force Microscopy (AFM) nanoimprint and anodic oxidation of Al surface. AFM nanoindentations substitute the first anodization process and even more important, allow us to control the symmetry and the lattice parameter of the ordered arrays. In addition, by using AFM nanoimprint method it is possible to select the region were the ordered alumina grows. We demonstrate that square nanoporous arrays of alumina with lattice parameter of 105 nm can be obtained by this method.