کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5424518 1395827 2008 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Submicron gold structures formed by atomic force microscopy lithography on thin films of poly(methyl methacrylate)
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
Submicron gold structures formed by atomic force microscopy lithography on thin films of poly(methyl methacrylate)
چکیده انگلیسی
Thin films of poly(methyl methacrylate) (PMMA) (25 nm) deposited on gold coated glass substrates have been locally modified by exposure to biased atomic force microscopy (AFM) tips. Constant exposure currents in the range of 0.5-0.65 nA leads to removal of PMMA both by direct ablation and enhanced solubility in a developer solution. Possible mechanisms causing such modifications have been discussed. Submicron Au structures were formed by combining AFM lithography, involving localized removal of PMMA, with sputter deposition of gold and a lift-off process.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 602, Issue 18, 15 September 2008, Pages 3051-3056
نویسندگان
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