Fabrication of a new micro bio chip and flow cell cytometry system using Bio-MEMS technology

This experiment was required the base technology's of micro packaging technology, micro fluidic technology, micro optical technology and electricity signal processing technology. This experiment emphasizes Bio-MEMS (micro electro mechanical system) technology and application. Material of chip was used the hydrophilic properties of good glass more than that of PDMS (poly dimethylsiloxane) and PMMA (poly methyl methacrylate). Method to use in chip manufacture is the BOEM (buffered oxide etchant method), ECDM (electro chemical discharge method) and UVAM (UV sensitive adhesives method). It is possible to measure the characteristics of various DNA. Therefore, those applications may be useful in other MEMS technology and optical science of biotechnology field [H.M. Shapiro, M.D, Practical Flow Cytometry, third ed., 1995; Z.D. kiewicz, J.P. Robinson, H.A. Crissman, Flow Cytometry, second ed., 1995].