کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
542546 871559 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A novel linearly tunable butterfly-shape MEMS capacitor
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
پیش نمایش صفحه اول مقاله
A novel linearly tunable butterfly-shape MEMS capacitor
چکیده انگلیسی

A new MEMS tunable capacitor with linear capacitance–voltage (C–V) response is introduced. The design is developed based on a parallel-plate configuration and uses the structural lumped flexibility and geometry optimization to obtain a linear response. The moving electrode is divided into two segments connected to one another by a torsional spring. There are extra beams located between the two plates, which constrain the displacement of the moving plate. The resulting nonlinear structural rigidity provides the design with higher tunability than the parallel-plate ones. Furthermore, because the plate's displacement is controlled, the shape of C–V curve changes in such a way that high linearity is achieved. The proposed design can be fabricated by a three-structural-layer process such as PolyMUMPs. The results of analytical solution and experimental measurements verify that the new capacitor can produce tunability of over 100% with high linearity. The introduced design methodology can further be extended to flexible plates and beams to obtain smooth C–V curves.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronics Journal - Volume 39, Issue 5, May 2008, Pages 756–762
نویسندگان
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